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In 2008, DARPA's Chip-Level Vacuum Micropumping (CSVMP) program was launched. The plan fulfilled the ultimate goal of achieving a vacuum pressure of 10-6 torr (1 torr equivalent to 1/760 at 1 atmosphere) in 1 cubic millimeter space with the smallest, most power-efficient pump.
Andeei Shkel, project manager at DARPA, said: "It is relatively easy to create a vacuum in space where aircraft testing is possible, as long as the space is tight, with large pumps and enough power, but this method can not Large, tiny cavities. Pumps that exploit new physical properties must be developed to try out the precision and miniaturization techniques that have never been tried before. "
The program has been successfully completed, the University of Michigan, Honeywell and MIT researchers are presenting the pump Pu.
The University of Michigan has developed three different pressure categories of pumps. From the lowest to the highest pressure are: plasma Penningtonium high vacuum pump, Nusen in the vacuum pump and high frequency peristaltic rough vacuum pump.
MIT team also developed three micro gas pumps. One of them is a second-order rough pump with a curved surface that can extract a large amount of gas and limit the backpressure with two valves. This new type of pump focuses on improving efficiency at a compression ratio of 4.6 per cycle, the highest of its kind.
Honeywell demonstrated precision machined turbo molecular pumps that create moderate vacuum and high vacuum. The pump mimics the turbine design, but in the opposite way. The blades on the rotor are preset at a certain angle and propel the gas as it rotates so that the center becomes a vacuum. Each blade has only the tip size.
"There was never any micro-ion or machine pump before, and the CSVMP project demonstrated a variety of these pumps. The smallest commercially available pump is card size only. The newly developed pump is not only 300x smaller than a ready-made pump but smaller than a custom pump 20 times, and also reduced the pressure from atmospheric pressure to milli-point pressure power is also reduced by about 10 times.
Initially, the CSVMP project focused on small mass spectrometry gas analyzers to make it easier to detect chemical and biological pathogens. As the project continues to develop smaller, more powerful pumps that create different degrees of vacuum, new uses emerge.
Shkel said: "Laser cooling atomic clocks, accelerometers and gyroscopes fundamentally need these micro gas pumps. The new pump technology helps to achieve smaller and more accurate atomic clocks, similar to the DARPA integrated micro main atomic clock technology (IMPACT) plans are being developed related technology, or high-frequency vacuum electron in a vacuum integrated electronics (HiFIVE) plan developed technology . "
The Defense Advanced Research Projects Agency developed chip-level vacuum micropumps
Researchers funded by the Defense Advanced Research Projects Agency (DARPA) recently demonstrated the world's smallest vacuum pump. This breakthrough technology creates new national security applications for electronics and sensors requiring vacuum such as highly sensitive gas analyzers for detecting chemical or biological attacks, ultra-precision laser-cooled chip-scale atomic clocks, miniature vacuum tubes, and more.